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A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection

Identificadores del recurso

Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.

2072-666X

http://hdl.handle.net/20.500.13003/9108

10.3390/mi9100484

30424417

2-s2.0-85053842111

000448554800010

Procedencia

(Docusalut. Repositorio institucional del sistema sanitario público de las Islas Baleares)

Ficha

Título:: A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
Tema:: MEMS resonators; mass sensors; CMOS-MEMS; pierce oscillator
Descrición:: This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.; This work has been supported by the Spanish Ministry of Economy and Competitiveness under project TEC2017-88635-R (AEI/FEDER, UE).
Idioma:: English
Relación:: https://dx.doi.org/10.3390/mi9100484
Autor/Productor:: Perello-Roig, Rafel; Verd, Jaume; Barcelo, Joan; Bota, Sebastia; Segura, Jaume
Editor:: MDPI
Dereitos:: Attribution 4.0 International; http://creativecommons.org/licenses/by/4.0/; open access
Data:: 2021-08-24T15:08:41Z; 2018-10
Tipo de recurso:: research article
Formato:: application/pdf

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