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A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection

Identificadores del recurso

Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.

2072-666X

http://hdl.handle.net/20.500.13003/9108

10.3390/mi9100484

30424417

2-s2.0-85053842111

000448554800010

Jatorria

(Docusalut. Repositorio institucional del sistema sanitario público de las Islas Baleares)

Fitxa

Izenburu:: A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
Tema:: MEMS resonators; mass sensors; CMOS-MEMS; pierce oscillator
Deskribapen:: This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.; This work has been supported by the Spanish Ministry of Economy and Competitiveness under project TEC2017-88635-R (AEI/FEDER, UE).
Idioma:: English
Harreman:: https://dx.doi.org/10.3390/mi9100484
Autor/Productor:: Perello-Roig, Rafel; Verd, Jaume; Barcelo, Joan; Bota, Sebastia; Segura, Jaume
Argitaratzaile:: MDPI
Eskubideak:: Attribution 4.0 International; http://creativecommons.org/licenses/by/4.0/; open access
Data:: 2021-08-24T15:08:41Z; 2018-10
Tipo de recurso:: research article

oai_dc

<?xml version="1.0" encoding="UTF-8" ?>

<oai_dc:dc schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
1. <dc:title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</dc:title>
2. <dc:creator>Perello-Roig, Rafel</dc:creator>
3. <dc:creator>Verd, Jaume</dc:creator>
4. <dc:creator>Barcelo, Joan</dc:creator>
5. <dc:creator>Bota, Sebastia</dc:creator>
6. <dc:creator>Segura, Jaume</dc:creator>
7. <dc:subject>MEMS resonators</dc:subject>
8. <dc:subject>mass sensors</dc:subject>
9. <dc:subject>CMOS-MEMS</dc:subject>
10. <dc:subject>pierce oscillator</dc:subject>
11. <dc:description>This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</dc:description>
12. <dc:description>This work has been supported by the Spanish Ministry of Economy and Competitiveness under project TEC2017-88635-R (AEI/FEDER, UE).</dc:description>
13. <dc:date>2021-08-24T15:08:41Z</dc:date>
14. <dc:date>2021-08-24T15:08:41Z</dc:date>
15. <dc:date>2018-10</dc:date>
16. <dc:type>research article</dc:type>
17. <dc:identifier>Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</dc:identifier>
18. <dc:identifier>2072-666X</dc:identifier>
19. <dc:identifier>http://hdl.handle.net/20.500.13003/9108</dc:identifier>
20. <dc:identifier>10.3390/mi9100484</dc:identifier>
21. <dc:identifier>30424417</dc:identifier>
22. <dc:identifier>2-s2.0-85053842111</dc:identifier>
23. <dc:identifier>000448554800010</dc:identifier>
24. <dc:language>eng</dc:language>
25. <dc:relation>https://dx.doi.org/10.3390/mi9100484</dc:relation>
26. <dc:rights>Attribution 4.0 International</dc:rights>
27. <dc:rights>http://creativecommons.org/licenses/by/4.0/</dc:rights>
28. <dc:rights>open access</dc:rights>
29. <dc:publisher>MDPI</dc:publisher>
</oai_dc:dc>

didl

<?xml version="1.0" encoding="UTF-8" ?>

<d:DIDL schemaLocation="urn:mpeg:mpeg21:2002:02-DIDL-NS http://standards.iso.org/ittf/PubliclyAvailableStandards/MPEG-21_schema_files/did/didl.xsd">
1. <d:DIDLInfo>
  1. <dcterms:created schemaLocation="http://purl.org/dc/terms/ http://dublincore.org/schemas/xmls/qdc/dcterms.xsd">2021-08-24T15:08:41Z</dcterms:created>
  </d:DIDLInfo>
2. <d:Item id="hdl_20.500.13003_9108">
  1. <d:Descriptor>
    1. <d:Statement mimeType="application/xml; charset=utf-8">
      1. <dii:Identifier schemaLocation="urn:mpeg:mpeg21:2002:01-DII-NS http://standards.iso.org/ittf/PubliclyAvailableStandards/MPEG-21_schema_files/dii/dii.xsd">urn:hdl:20.500.13003/9108</dii:Identifier>
      </d:Statement>
    </d:Descriptor>
  2. <d:Descriptor>
    1. <d:Statement mimeType="application/xml; charset=utf-8">
      1. <oai_dc:dc schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
        <dc:title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</dc:title>
        <dc:creator>Perello-Roig, Rafel</dc:creator>
        <dc:creator>Verd, Jaume</dc:creator>
        <dc:creator>Barcelo, Joan</dc:creator>
        <dc:creator>Bota, Sebastia</dc:creator>
        <dc:creator>Segura, Jaume</dc:creator>
        <dc:description>This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</dc:description>
        <dc:date>2021-08-24T15:08:41Z</dc:date>
        <dc:date>2021-08-24T15:08:41Z</dc:date>
        <dc:date>2018-10</dc:date>
        <dc:type>research article</dc:type>
        <dc:identifier>Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</dc:identifier>
        <dc:identifier>2072-666X</dc:identifier>
        <dc:identifier>http://hdl.handle.net/20.500.13003/9108</dc:identifier>
        <dc:identifier>10.3390/mi9100484</dc:identifier>
        <dc:identifier>30424417</dc:identifier>
        <dc:identifier>2-s2.0-85053842111</dc:identifier>
        <dc:identifier>000448554800010</dc:identifier>
        <dc:language>eng</dc:language>
        <dc:relation>https://dx.doi.org/10.3390/mi9100484</dc:relation>
        <dc:rights>http://creativecommons.org/licenses/by/4.0/</dc:rights>
        <dc:rights>open access</dc:rights>
        <dc:rights>Attribution 4.0 International</dc:rights>
        <dc:publisher>MDPI</dc:publisher>
        </oai_dc:dc>
      </d:Statement>
    </d:Descriptor>
  3. <d:Component id="20.500.13003_9108_1">
    1. <d:Resource mimeType="application/pdf" ref="https://docusalut.com/bitstream/20.500.13003/9108/1/000448554800010.pdf" />
    </d:Component>
  </d:Item>
</d:DIDL>

dim

<?xml version="1.0" encoding="UTF-8" ?>

<dim:dim schemaLocation="http://www.dspace.org/xmlns/dspace/dim http://www.dspace.org/schema/dim.xsd">
1. <dim:field authority="2568" confidence="500" element="contributor" mdschema="dc" orcid_id="" qualifier="author">Perello-Roig, Rafel</dim:field>
2. <dim:field authority="777" confidence="500" element="contributor" mdschema="dc" orcid_id="0000-0003-3704-2709" qualifier="author">Verd, Jaume</dim:field>
3. <dim:field authority="0b02573c-c96b-465d-be5e-3903dbd518d9" confidence="500" element="contributor" mdschema="dc" orcid_id="" qualifier="author">Barcelo, Joan</dim:field>
4. <dim:field authority="2570" confidence="500" element="contributor" mdschema="dc" orcid_id="" qualifier="author">Bota, Sebastia</dim:field>
5. <dim:field authority="2571" confidence="500" element="contributor" mdschema="dc" orcid_id="" qualifier="author">Segura, Jaume</dim:field>
6. <dim:field element="date" mdschema="dc" qualifier="accessioned">2021-08-24T15:08:41Z</dim:field>
7. <dim:field element="date" mdschema="dc" qualifier="available">2021-08-24T15:08:41Z</dim:field>
8. <dim:field element="date" mdschema="dc" qualifier="issued">2018-10</dim:field>
9. <dim:field element="identifier" lang="en" mdschema="dc" qualifier="citation">Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</dim:field>
10. <dim:field element="identifier" mdschema="dc" qualifier="issn">2072-666X</dim:field>
11. <dim:field element="identifier" mdschema="dc" qualifier="uri">http://hdl.handle.net/20.500.13003/9108</dim:field>
12. <dim:field element="identifier" mdschema="dc" qualifier="doi">10.3390/mi9100484</dim:field>
13. <dim:field element="identifier" mdschema="dc" qualifier="pmid">30424417</dim:field>
14. <dim:field element="identifier" mdschema="dc" qualifier="scopus">2-s2.0-85053842111</dim:field>
15. <dim:field element="identifier" mdschema="dc" qualifier="wos">000448554800010</dim:field>
16. <dim:field element="description" lang="en" mdschema="dc" qualifier="abstract">This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</dim:field>
17. <dim:field element="description" lang="en" mdschema="dc" qualifier="fundingtext">This work has been supported by the Spanish Ministry of Economy and Competitiveness under project TEC2017-88635-R (AEI/FEDER, UE).</dim:field>
18. <dim:field element="language" lang="en" mdschema="dc" qualifier="iso">eng</dim:field>
19. <dim:field element="publisher" lang="en" mdschema="dc">MDPI</dim:field>
20. <dim:field element="rights" lang="*" mdschema="dc">Attribution 4.0 International</dim:field>
21. <dim:field element="rights" lang="*" mdschema="dc" qualifier="uri">http://creativecommons.org/licenses/by/4.0/</dim:field>
22. <dim:field element="rights" lang="en" mdschema="dc" qualifier="accessRights">open access</dim:field>
23. <dim:field element="title" lang="en" mdschema="dc">A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</dim:field>
24. <dim:field element="type" lang="en" mdschema="dc">research article</dim:field>
25. <dim:field element="issue" lang="en" mdschema="dc" qualifier="number">10</dim:field>
26. <dim:field element="journal" lang="en" mdschema="dc" qualifier="title">Micromachines</dim:field>
27. <dim:field element="page" lang="en" mdschema="dc" qualifier="initial">484</dim:field>
28. <dim:field element="relation" lang="en" mdschema="dc" qualifier="publisherversion">https://dx.doi.org/10.3390/mi9100484</dim:field>
29. <dim:field element="subject" lang="en" mdschema="dc" qualifier="keyword">MEMS resonators</dim:field>
30. <dim:field element="subject" lang="en" mdschema="dc" qualifier="keyword">mass sensors</dim:field>
31. <dim:field element="subject" lang="en" mdschema="dc" qualifier="keyword">CMOS-MEMS</dim:field>
32. <dim:field element="subject" lang="en" mdschema="dc" qualifier="keyword">pierce oscillator</dim:field>
33. <dim:field element="volume" lang="en" mdschema="dc" qualifier="number">9</dim:field>
</dim:dim>

etdms

<?xml version="1.0" encoding="UTF-8" ?>

<thesis schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.0/ http://www.ndltd.org/standards/metadata/etdms/1.0/etdms.xsd">
1. <title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</title>
2. <creator>Perello-Roig, Rafel</creator>
3. <creator>Verd, Jaume</creator>
4. <creator>Barcelo, Joan</creator>
5. <creator>Bota, Sebastia</creator>
6. <creator>Segura, Jaume</creator>
7. <description>This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</description>
8. <date>2021-08-24</date>
9. <date>2021-08-24</date>
10. <date>2018-10</date>
11. <type>research article</type>
12. <identifier>Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</identifier>
13. <identifier>2072-666X</identifier>
14. <identifier>http://hdl.handle.net/20.500.13003/9108</identifier>
15. <identifier>10.3390/mi9100484</identifier>
16. <identifier>30424417</identifier>
17. <identifier>2-s2.0-85053842111</identifier>
18. <identifier>000448554800010</identifier>
19. <language>eng</language>
20. <relation>https://dx.doi.org/10.3390/mi9100484</relation>
21. <rights>http://creativecommons.org/licenses/by/4.0/</rights>
22. <rights>open access</rights>
23. <rights>Attribution 4.0 International</rights>
24. <publisher>MDPI</publisher>
</thesis>

marc

<?xml version="1.0" encoding="UTF-8" ?>

<record schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd">
1. <leader>00925njm 22002777a 4500</leader>
2. <datafield ind1=" " ind2=" " tag="042">
  1. <subfield code="a">dc</subfield>
  </datafield>
3. <datafield ind1=" " ind2=" " tag="720">
  1. <subfield code="a">Perello-Roig, Rafel</subfield>
  2. <subfield code="e">author</subfield>
  </datafield>
4. <datafield ind1=" " ind2=" " tag="720">
  1. <subfield code="a">Verd, Jaume</subfield>
  2. <subfield code="e">author</subfield>
  </datafield>
5. <datafield ind1=" " ind2=" " tag="720">
  1. <subfield code="a">Barcelo, Joan</subfield>
  2. <subfield code="e">author</subfield>
  </datafield>
6. <datafield ind1=" " ind2=" " tag="720">
  1. <subfield code="a">Bota, Sebastia</subfield>
  2. <subfield code="e">author</subfield>
  </datafield>
7. <datafield ind1=" " ind2=" " tag="720">
  1. <subfield code="a">Segura, Jaume</subfield>
  2. <subfield code="e">author</subfield>
  </datafield>
8. <datafield ind1=" " ind2=" " tag="260">
  1. <subfield code="c">2018-10</subfield>
  </datafield>
9. <datafield ind1=" " ind2=" " tag="520">
  1. <subfield code="a">This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</subfield>
  </datafield>
10. <datafield ind1="8" ind2=" " tag="024">
  1. <subfield code="a">Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</subfield>
  </datafield>
11. <datafield ind1="8" ind2=" " tag="024">
  1. <subfield code="a">2072-666X</subfield>
  </datafield>
12. <datafield ind1="8" ind2=" " tag="024">
  1. <subfield code="a">http://hdl.handle.net/20.500.13003/9108</subfield>
  </datafield>
13. <datafield ind1="8" ind2=" " tag="024">
  1. <subfield code="a">10.3390/mi9100484</subfield>
  </datafield>
14. <datafield ind1="8" ind2=" " tag="024">
  1. <subfield code="a">30424417</subfield>
  </datafield>
15. <datafield ind1="8" ind2=" " tag="024">
  1. <subfield code="a">2-s2.0-85053842111</subfield>
  </datafield>
16. <datafield ind1="8" ind2=" " tag="024">
  1. <subfield code="a">000448554800010</subfield>
  </datafield>
17. <datafield ind1="0" ind2="0" tag="245">
  1. <subfield code="a">A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</subfield>
  </datafield>
</record>

mets

<?xml version="1.0" encoding="UTF-8" ?>

<mets ID=" DSpace_ITEM_20.500.13003-9108" OBJID=" hdl:20.500.13003/9108" PROFILE="DSpace METS SIP Profile 1.0" TYPE="DSpace ITEM" schemaLocation="http://www.loc.gov/METS/ http://www.loc.gov/standards/mets/mets.xsd">
1. <metsHdr CREATEDATE="2024-09-29T04:05:30Z">
  1. <agent ROLE="CUSTODIAN" TYPE="ORGANIZATION">
    1. <name>Docusalut</name>
    </agent>
  </metsHdr>
2. <dmdSec ID="DMD_20.500.13003_9108">
  1. <mdWrap MDTYPE="MODS">
    1. <xmlData schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
      1. <mods:mods schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
        <mods:name>
        <mods:role>
        <mods:roleTerm type="text">author</mods:roleTerm>
        </mods:role>
        <mods:namePart>Perello-Roig, Rafel</mods:namePart>
        </mods:name>
        <mods:name>
        <mods:role>
        <mods:roleTerm type="text">author</mods:roleTerm>
        </mods:role>
        <mods:namePart>Verd, Jaume</mods:namePart>
        </mods:name>
        <mods:name>
        <mods:role>
        <mods:roleTerm type="text">author</mods:roleTerm>
        </mods:role>
        <mods:namePart>Barcelo, Joan</mods:namePart>
        </mods:name>
        <mods:name>
        <mods:role>
        <mods:roleTerm type="text">author</mods:roleTerm>
        </mods:role>
        <mods:namePart>Bota, Sebastia</mods:namePart>
        </mods:name>
        <mods:name>
        <mods:role>
        <mods:roleTerm type="text">author</mods:roleTerm>
        </mods:role>
        <mods:namePart>Segura, Jaume</mods:namePart>
        </mods:name>
        <mods:extension>
        <mods:dateAccessioned encoding="iso8601">2021-08-24T15:08:41Z</mods:dateAccessioned>
        </mods:extension>
        <mods:extension>
        <mods:dateAvailable encoding="iso8601">2021-08-24T15:08:41Z</mods:dateAvailable>
        </mods:extension>
        <mods:originInfo>
        <mods:dateIssued encoding="iso8601">2018-10</mods:dateIssued>
        </mods:originInfo>
        <mods:identifier type="citation">Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</mods:identifier>
        <mods:identifier type="issn">2072-666X</mods:identifier>
        <mods:identifier type="uri">http://hdl.handle.net/20.500.13003/9108</mods:identifier>
        <mods:identifier type="doi">10.3390/mi9100484</mods:identifier>
        <mods:identifier type="pmid">30424417</mods:identifier>
        <mods:identifier type="scopus">2-s2.0-85053842111</mods:identifier>
        <mods:identifier type="wos">000448554800010</mods:identifier>
        <mods:abstract>This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</mods:abstract>
        <mods:language>
        <mods:languageTerm authority="rfc3066">eng</mods:languageTerm>
        </mods:language>
        <mods:accessCondition type="useAndReproduction">Attribution 4.0 International</mods:accessCondition>
        <mods:titleInfo>
        <mods:title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</mods:title>
        </mods:titleInfo>
        <mods:genre>research article</mods:genre>
        </mods:mods>
      </xmlData>
    </mdWrap>
  </dmdSec>
3. <amdSec ID="FO_20.500.13003_9108_1">
  1. <techMD ID="TECH_O_20.500.13003_9108_1">
    1. <mdWrap MDTYPE="PREMIS">
      1. <xmlData schemaLocation="http://www.loc.gov/standards/premis http://www.loc.gov/standards/premis/PREMIS-v1-0.xsd">
        <premis:premis>
        <premis:object>
        <premis:objectIdentifier>
        <premis:objectIdentifierType>URL</premis:objectIdentifierType>
        <premis:objectIdentifierValue>https://docusalut.com/bitstream/20.500.13003/9108/1/000448554800010.pdf</premis:objectIdentifierValue>
        </premis:objectIdentifier>
        <premis:objectCategory>File</premis:objectCategory>
        <premis:objectCharacteristics>
        <premis:fixity>
        <premis:messageDigestAlgorithm>MD5</premis:messageDigestAlgorithm>
        <premis:messageDigest>49779d302ba8afceffb0e952101016d5</premis:messageDigest>
        </premis:fixity>
        <premis:size>4093142</premis:size>
        <premis:format>
        <premis:formatDesignation>
        <premis:formatName>application/pdf</premis:formatName>
        </premis:formatDesignation>
        </premis:format>
        </premis:objectCharacteristics>
        <premis:originalName>000448554800010.pdf</premis:originalName>
        </premis:object>
        </premis:premis>
        </xmlData>
      </mdWrap>
    </techMD>
  </amdSec>
4. <amdSec ID="FT_20.500.13003_9108_3">
  1. <techMD ID="TECH_T_20.500.13003_9108_3">
    1. <mdWrap MDTYPE="PREMIS">
      1. <xmlData schemaLocation="http://www.loc.gov/standards/premis http://www.loc.gov/standards/premis/PREMIS-v1-0.xsd">
        <premis:premis>
        <premis:object>
        <premis:objectIdentifier>
        <premis:objectIdentifierType>URL</premis:objectIdentifierType>
        <premis:objectIdentifierValue>https://docusalut.com/bitstream/20.500.13003/9108/3/000448554800010.pdf.txt</premis:objectIdentifierValue>
        </premis:objectIdentifier>
        <premis:objectCategory>File</premis:objectCategory>
        <premis:objectCharacteristics>
        <premis:fixity>
        <premis:messageDigestAlgorithm>MD5</premis:messageDigestAlgorithm>
        <premis:messageDigest>08abcf09e2216fdb22c1660bac5cdcd6</premis:messageDigest>
        </premis:fixity>
        <premis:size>42015</premis:size>
        <premis:format>
        <premis:formatDesignation>
        <premis:formatName>text/plain</premis:formatName>
        </premis:formatDesignation>
        </premis:format>
        </premis:objectCharacteristics>
        <premis:originalName>000448554800010.pdf.txt</premis:originalName>
        </premis:object>
        </premis:premis>
        </xmlData>
      </mdWrap>
    </techMD>
  </amdSec>
5. <fileSec>
  1. <fileGrp USE="ORIGINAL">
    1. <file ADMID="FO_20.500.13003_9108_1" CHECKSUM="49779d302ba8afceffb0e952101016d5" CHECKSUMTYPE="MD5" GROUPID="GROUP_BITSTREAM_20.500.13003_9108_1" ID="BITSTREAM_ORIGINAL_20.500.13003_9108_1" MIMETYPE="application/pdf" SEQ="1" SIZE="4093142">
      1. <FLocat LOCTYPE="URL" href="https://docusalut.com/bitstream/20.500.13003/9108/1/000448554800010.pdf" type="simple" />
      </file>
    </fileGrp>
  2. <fileGrp USE="TEXT">
    1. <file ADMID="FT_20.500.13003_9108_3" CHECKSUM="08abcf09e2216fdb22c1660bac5cdcd6" CHECKSUMTYPE="MD5" GROUPID="GROUP_BITSTREAM_20.500.13003_9108_3" ID="BITSTREAM_TEXT_20.500.13003_9108_3" MIMETYPE="text/plain" SEQ="3" SIZE="42015">
      1. <FLocat LOCTYPE="URL" href="https://docusalut.com/bitstream/20.500.13003/9108/3/000448554800010.pdf.txt" type="simple" />
      </file>
    </fileGrp>
  </fileSec>
6. <structMap LABEL="DSpace Object" TYPE="LOGICAL">
  1. <div ADMID="DMD_20.500.13003_9108" TYPE="DSpace Object Contents">
    1. <div TYPE="DSpace BITSTREAM">
      1. <fptr FILEID="BITSTREAM_ORIGINAL_20.500.13003_9108_1" />
      </div>
    </div>
  </structMap>
</mets>

mods

<?xml version="1.0" encoding="UTF-8" ?>

<mods:mods schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
1. <mods:name>
  1. <mods:namePart>Perello-Roig, Rafel</mods:namePart>
  </mods:name>
2. <mods:name>
  1. <mods:namePart>Verd, Jaume</mods:namePart>
  </mods:name>
3. <mods:name>
  1. <mods:namePart>Barcelo, Joan</mods:namePart>
  </mods:name>
4. <mods:name>
  1. <mods:namePart>Bota, Sebastia</mods:namePart>
  </mods:name>
5. <mods:name>
  1. <mods:namePart>Segura, Jaume</mods:namePart>
  </mods:name>
6. <mods:extension>
  1. <mods:dateAvailable encoding="iso8601">2021-08-24T15:08:41Z</mods:dateAvailable>
  </mods:extension>
7. <mods:extension>
  1. <mods:dateAccessioned encoding="iso8601">2021-08-24T15:08:41Z</mods:dateAccessioned>
  </mods:extension>
8. <mods:originInfo>
  1. <mods:dateIssued encoding="iso8601">2018-10</mods:dateIssued>
  </mods:originInfo>
9. <mods:identifier type="citation">Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</mods:identifier>
10. <mods:identifier type="issn">2072-666X</mods:identifier>
11. <mods:identifier type="uri">http://hdl.handle.net/20.500.13003/9108</mods:identifier>
12. <mods:identifier type="doi">10.3390/mi9100484</mods:identifier>
13. <mods:identifier type="pmid">30424417</mods:identifier>
14. <mods:identifier type="scopus">2-s2.0-85053842111</mods:identifier>
15. <mods:identifier type="wos">000448554800010</mods:identifier>
16. <mods:abstract>This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</mods:abstract>
17. <mods:language>
  1. <mods:languageTerm>eng</mods:languageTerm>
  </mods:language>
18. <mods:accessCondition type="useAndReproduction">http://creativecommons.org/licenses/by/4.0/</mods:accessCondition>
19. <mods:accessCondition type="useAndReproduction">open access</mods:accessCondition>
20. <mods:accessCondition type="useAndReproduction">Attribution 4.0 International</mods:accessCondition>
21. <mods:titleInfo>
  1. <mods:title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</mods:title>
  </mods:titleInfo>
22. <mods:genre>research article</mods:genre>
</mods:mods>

ore

<?xml version="1.0" encoding="UTF-8" ?>

<atom:entry schemaLocation="http://www.w3.org/2005/Atom http://www.kbcafe.com/rss/atom.xsd.xml">
1. <atom:id>http://hdl.handle.net/20.500.13003/9108/ore.xml</atom:id>
2. <atom:link href="http://hdl.handle.net/20.500.13003/9108" rel="alternate" />
3. <atom:link href="http://hdl.handle.net/20.500.13003/9108/ore.xml" rel="http://www.openarchives.org/ore/terms/describes" />
4. <atom:link href="http://hdl.handle.net/20.500.13003/9108/ore.xml#atom" rel="self" type="application/atom+xml" />
5. <atom:published>2021-08-24T15:08:41Z</atom:published>
6. <atom:updated>2021-08-24T15:08:41Z</atom:updated>
7. <atom:source>
  1. <atom:generator>Docusalut</atom:generator>
  </atom:source>
8. <atom:title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</atom:title>
9. <atom:author>
  1. <atom:name>Perello-Roig, Rafel</atom:name>
  </atom:author>
10. <atom:author>
  1. <atom:name>Verd, Jaume</atom:name>
  </atom:author>
11. <atom:author>
  1. <atom:name>Barcelo, Joan</atom:name>
  </atom:author>
12. <atom:author>
  1. <atom:name>Bota, Sebastia</atom:name>
  </atom:author>
13. <atom:author>
  1. <atom:name>Segura, Jaume</atom:name>
  </atom:author>
14. <atom:category label="Aggregation" scheme="http://www.openarchives.org/ore/terms/" term="http://www.openarchives.org/ore/terms/Aggregation" />
15. <atom:category scheme="http://www.openarchives.org/ore/atom/modified" term="2021-08-24T15:08:41Z" />
16. <atom:category label="DSpace Item" scheme="http://www.dspace.org/objectModel/" term="DSpaceItem" />
17. <atom:link href="https://docusalut.com/bitstream/20.500.13003/9108/1/000448554800010.pdf" length="4093142" rel="http://www.openarchives.org/ore/terms/aggregates" title="000448554800010.pdf" type="application/pdf" />
18. <oreatom:triples>
  1. <rdf:Description about="http://hdl.handle.net/20.500.13003/9108/ore.xml#atom">
    1. <rdf:type resource="http://www.dspace.org/objectModel/DSpaceItem" />
    2. <dcterms:modified>2021-08-24T15:08:41Z</dcterms:modified>
    </rdf:Description>
  2. <rdf:Description about="https://docusalut.com/bitstream/20.500.13003/9108/1/000448554800010.pdf">
    1. <rdf:type resource="http://www.dspace.org/objectModel/DSpaceBitstream" />
    2. <dcterms:description>ORIGINAL</dcterms:description>
    </rdf:Description>
  3. <rdf:Description about="https://docusalut.com/bitstream/20.500.13003/9108/2/license_rdf">
    1. <rdf:type resource="http://www.dspace.org/objectModel/DSpaceBitstream" />
    2. <dcterms:description>CC-LICENSE</dcterms:description>
    </rdf:Description>
  4. <rdf:Description about="https://docusalut.com/bitstream/20.500.13003/9108/3/000448554800010.pdf.txt">
    1. <rdf:type resource="http://www.dspace.org/objectModel/DSpaceBitstream" />
    2. <dcterms:description>TEXT</dcterms:description>
    </rdf:Description>
  5. <rdf:Description about="https://docusalut.com/bitstream/20.500.13003/9108/4/000448554800010.pdf.jpg">
    1. <rdf:type resource="http://www.dspace.org/objectModel/DSpaceBitstream" />
    2. <dcterms:description>THUMBNAIL</dcterms:description>
    </rdf:Description>
  </oreatom:triples>
</atom:entry>

qdc

<?xml version="1.0" encoding="UTF-8" ?>

<qdc:qualifieddc schemaLocation="http://purl.org/dc/elements/1.1/ http://dublincore.org/schemas/xmls/qdc/2006/01/06/dc.xsd http://purl.org/dc/terms/ http://dublincore.org/schemas/xmls/qdc/2006/01/06/dcterms.xsd http://dspace.org/qualifieddc/ http://www.ukoln.ac.uk/metadata/dcmi/xmlschema/qualifieddc.xsd">
1. <dc:title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</dc:title>
2. <dc:creator>Perello-Roig, Rafel</dc:creator>
3. <dc:creator>Verd, Jaume</dc:creator>
4. <dc:creator>Barcelo, Joan</dc:creator>
5. <dc:creator>Bota, Sebastia</dc:creator>
6. <dc:creator>Segura, Jaume</dc:creator>
7. <dcterms:abstract>This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</dcterms:abstract>
8. <dcterms:dateAccepted>2021-08-24T15:08:41Z</dcterms:dateAccepted>
9. <dcterms:available>2021-08-24T15:08:41Z</dcterms:available>
10. <dcterms:created>2021-08-24T15:08:41Z</dcterms:created>
11. <dcterms:issued>2018-10</dcterms:issued>
12. <dc:type>research article</dc:type>
13. <dc:identifier>Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</dc:identifier>
14. <dc:identifier>2072-666X</dc:identifier>
15. <dc:identifier>http://hdl.handle.net/20.500.13003/9108</dc:identifier>
16. <dc:identifier>10.3390/mi9100484</dc:identifier>
17. <dc:identifier>30424417</dc:identifier>
18. <dc:identifier>2-s2.0-85053842111</dc:identifier>
19. <dc:identifier>000448554800010</dc:identifier>
20. <dc:language>eng</dc:language>
21. <dc:relation>https://dx.doi.org/10.3390/mi9100484</dc:relation>
22. <dc:rights>http://creativecommons.org/licenses/by/4.0/</dc:rights>
23. <dc:rights>open access</dc:rights>
24. <dc:rights>Attribution 4.0 International</dc:rights>
25. <dc:publisher>MDPI</dc:publisher>
</qdc:qualifieddc>

rdf

<?xml version="1.0" encoding="UTF-8" ?>

<rdf:RDF schemaLocation="http://www.openarchives.org/OAI/2.0/rdf/ http://www.openarchives.org/OAI/2.0/rdf.xsd">
1. <ow:Publication about="oai:docusalut.com:20.500.13003/9108">
  1. <dc:title>A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</dc:title>
  2. <dc:creator>Perello-Roig, Rafel</dc:creator>
  3. <dc:creator>Verd, Jaume</dc:creator>
  4. <dc:creator>Barcelo, Joan</dc:creator>
  5. <dc:creator>Bota, Sebastia</dc:creator>
  6. <dc:creator>Segura, Jaume</dc:creator>
  7. <dc:description>This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</dc:description>
  8. <dc:date>2021-08-24T15:08:41Z</dc:date>
  9. <dc:date>2021-08-24T15:08:41Z</dc:date>
  10. <dc:date>2018-10</dc:date>
  11. <dc:type>research article</dc:type>
  12. <dc:identifier>Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</dc:identifier>
  13. <dc:identifier>2072-666X</dc:identifier>
  14. <dc:identifier>http://hdl.handle.net/20.500.13003/9108</dc:identifier>
  15. <dc:identifier>10.3390/mi9100484</dc:identifier>
  16. <dc:identifier>30424417</dc:identifier>
  17. <dc:identifier>2-s2.0-85053842111</dc:identifier>
  18. <dc:identifier>000448554800010</dc:identifier>
  19. <dc:language>eng</dc:language>
  20. <dc:relation>https://dx.doi.org/10.3390/mi9100484</dc:relation>
  21. <dc:rights>http://creativecommons.org/licenses/by/4.0/</dc:rights>
  22. <dc:rights>open access</dc:rights>
  23. <dc:rights>Attribution 4.0 International</dc:rights>
  24. <dc:publisher>MDPI</dc:publisher>
  </ow:Publication>
</rdf:RDF>

xoai

<?xml version="1.0" encoding="UTF-8" ?>

<metadata schemaLocation="http://www.lyncode.com/xoai http://www.lyncode.com/xsd/xoai.xsd">
1. <element name="dc">
  1. <element name="contributor">
    1. <element name="author">
      1. <element name="none">
        <field name="value">Perello-Roig, Rafel</field>
        <field name="authority">2568</field>
        <field name="confidence">500</field>
        <field name="orcid_id" />
        <field name="value">Verd, Jaume</field>
        <field name="authority">777</field>
        <field name="confidence">500</field>
        <field name="orcid_id">0000-0003-3704-2709</field>
        <field name="value">Barcelo, Joan</field>
        <field name="authority">0b02573c-c96b-465d-be5e-3903dbd518d9</field>
        <field name="confidence">500</field>
        <field name="orcid_id" />
        <field name="value">Bota, Sebastia</field>
        <field name="authority">2570</field>
        <field name="confidence">500</field>
        <field name="orcid_id" />
        <field name="value">Segura, Jaume</field>
        <field name="authority">2571</field>
        <field name="confidence">500</field>
        <field name="orcid_id" />
        </element>
      </element>
    </element>
  2. <element name="date">
    1. <element name="accessioned">
      1. <element name="none">
        <field name="value">2021-08-24T15:08:41Z</field>
        </element>
      </element>
    2. <element name="available">
      1. <element name="none">
        <field name="value">2021-08-24T15:08:41Z</field>
        </element>
      </element>
    3. <element name="issued">
      1. <element name="none">
        <field name="value">2018-10</field>
        </element>
      </element>
    4. <element name="embargoEndDate">
      1. <element name="none" />
      </element>
    </element>
  3. <element name="identifier">
    1. <element name="citation">
      1. <element name="en">
        <field name="value">Perello Roig R, Verd J, Barcelo J, Bota Sebastià A, Segura Fuster J. A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. Micromachines. 2018 Oct;9(10):484.</field>
        </element>
      </element>
    2. <element name="issn">
      1. <element name="none">
        <field name="value">2072-666X</field>
        </element>
      </element>
    3. <element name="uri">
      1. <element name="none">
        <field name="value">http://hdl.handle.net/20.500.13003/9108</field>
        </element>
      </element>
    4. <element name="doi">
      1. <element name="none">
        <field name="value">10.3390/mi9100484</field>
        </element>
      </element>
    5. <element name="pmid">
      1. <element name="none">
        <field name="value">30424417</field>
        </element>
      </element>
    6. <element name="scopus">
      1. <element name="none">
        <field name="value">2-s2.0-85053842111</field>
        </element>
      </element>
    7. <element name="wos">
      1. <element name="none">
        <field name="value">000448554800010</field>
        </element>
      </element>
    </element>
  4. <element name="description">
    1. <element name="abstract">
      1. <element name="en">
        <field name="value">This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices.</field>
        </element>
      </element>
    2. <element name="fundingtext">
      1. <element name="en">
        <field name="value">This work has been supported by the Spanish Ministry of Economy and Competitiveness under project TEC2017-88635-R (AEI/FEDER, UE).</field>
        </element>
      </element>
    </element>
  5. <element name="language">
    1. <element name="iso">
      1. <element name="en">
        <field name="value">eng</field>
        </element>
      </element>
    </element>
  6. <element name="publisher">
    1. <element name="en">
      1. <field name="value">MDPI</field>
      </element>
    </element>
  7. <element name="rights">
    1. <element name="*">
      1. <field name="value">Attribution 4.0 International</field>
      </element>
    2. <element name="uri">
      1. <element name="*">
        <field name="value">http://creativecommons.org/licenses/by/4.0/</field>
        </element>
      </element>
    3. <element name="accessRights">
      1. <element name="en">
        <field name="value">open access</field>
        </element>
      </element>
    </element>
  8. <element name="title">
    1. <element name="en">
      1. <field name="value">A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection</field>
      </element>
    </element>
  9. <element name="type">
    1. <element name="en">
      1. <field name="value">research article</field>
      </element>
    </element>
  10. <element name="issue">
    1. <element name="number">
      1. <element name="en">
        <field name="value">10</field>
        </element>
      </element>
    </element>
  11. <element name="journal">
    1. <element name="title">
      1. <element name="en">
        <field name="value">Micromachines</field>
        </element>
      </element>
    </element>
  12. <element name="page">
    1. <element name="initial">
      1. <element name="en">
        <field name="value">484</field>
        </element>
      </element>
    </element>
  13. <element name="relation">
    1. <element name="publisherversion">
      1. <element name="en">
        <field name="value">https://dx.doi.org/10.3390/mi9100484</field>
        </element>
      </element>
    </element>
  14. <element name="subject">
    1. <element name="keyword">
      1. <element name="en">
        <field name="value">MEMS resonators</field>
        <field name="value">mass sensors</field>
        <field name="value">CMOS-MEMS</field>
        <field name="value">pierce oscillator</field>
        </element>
      </element>
    </element>
  15. <element name="volume">
    1. <element name="number">
      1. <element name="en">
        <field name="value">9</field>
        </element>
      </element>
    </element>
  </element>
2. <element name="bundles">
  1. <element name="bundle">
    1. <field name="name">ORIGINAL</field>
    2. <element name="bitstreams">
      1. <element name="bitstream">
        <field name="name">000448554800010.pdf</field>
        <field name="format">application/pdf</field>
        <field name="size">4093142</field>
        <field name="url">https://docusalut.com/bitstream/20.500.13003/9108/1/000448554800010.pdf</field>
        <field name="checksum">49779d302ba8afceffb0e952101016d5</field>
        <field name="checksumAlgorithm">MD5</field>
        <field name="sid">1</field>
        <field name="drm">open access</field>
        </element>
      </element>
    </element>
  2. <element name="bundle">
    1. <field name="name">CC-LICENSE</field>
    2. <element name="bitstreams">
      1. <element name="bitstream">
        <field name="name">license_rdf</field>
        <field name="format">application/octet-stream</field>
        <field name="size">908</field>
        <field name="url">https://docusalut.com/bitstream/20.500.13003/9108/2/license_rdf</field>
        <field name="checksum">0175ea4a2d4caec4bbcc37e300941108</field>
        <field name="checksumAlgorithm">MD5</field>
        <field name="sid">2</field>
        <field name="drm">open access</field>
        </element>
      </element>
    </element>
  3. <element name="bundle">
    1. <field name="name">TEXT</field>
    2. <element name="bitstreams">
      1. <element name="bitstream">
        <field name="name">000448554800010.pdf.txt</field>
        <field name="originalName">000448554800010.pdf.txt</field>
        <field name="description">Extracted text</field>
        <field name="format">text/plain</field>
        <field name="size">42015</field>
        <field name="url">https://docusalut.com/bitstream/20.500.13003/9108/3/000448554800010.pdf.txt</field>
        <field name="checksum">08abcf09e2216fdb22c1660bac5cdcd6</field>
        <field name="checksumAlgorithm">MD5</field>
        <field name="sid">3</field>
        <field name="drm">open access</field>
        </element>
      </element>
    </element>
  4. <element name="bundle">
    1. <field name="name">THUMBNAIL</field>
    2. <element name="bitstreams">
      1. <element name="bitstream">
        <field name="name">000448554800010.pdf.jpg</field>
        <field name="originalName">000448554800010.pdf.jpg</field>
        <field name="description">IM Thumbnail</field>
        <field name="format">image/jpeg</field>
        <field name="size">20304</field>
        <field name="url">https://docusalut.com/bitstream/20.500.13003/9108/4/000448554800010.pdf.jpg</field>
        <field name="checksum">27d9d8808e3d0520af5f12ad249d699b</field>
        <field name="checksumAlgorithm">MD5</field>
        <field name="sid">4</field>
        <field name="drm">open access</field>
        </element>
      </element>
    </element>
  </element>
3. <element name="others">
  1. <field name="handle">20.500.13003/9108</field>
  2. <field name="identifier">oai:docusalut.com:20.500.13003/9108</field>
  3. <field name="lastModifyDate">2024-07-10 14:17:07.439</field>
  4. <field name="drm">open access</field>
  </element>
4. <element name="repository">
  1. <field name="name">Docusalut</field>
  2. <field name="mail">docusalut@bibliosalut.com</field>
  </element>
</metadata>